SLICED MULTILAYER MINIGRATINGS AND COMPACT SPECTROMETERS
COMPACT SPECTROMETER FOR SOFT X-RAY REGION
BASED ON A SLICED MULTILAYER GRATING
Specification
| available | possible improvement | |
| spectral range | 12.4 — 25.0 nm | 3.0 — 25.0 nm |
| grating period | 0.1 µm | 0.04 µm |
| number of periods | 500 | 4000 |
| entrance aperture angle | 2 mrad | 10 mrad |
| diffraction efficiency | ~ 40% (calculated) | |
| width of the spectral band at fixed incidence angle | 5 nm | |
| detector | X-ray film | CCD |
| dispersion on the focal curve | 1 nm/mm | |
| focal distance | 30 mm | |
| weight | 150 g | |
| sizes | 30x30x50 mm |