SLICED MULTILAYER MINIGRATINGS AND COMPACT SPECTROMETERS

COMPACT SPECTROMETER FOR SOFT X-RAY REGION
BASED ON A SLICED MULTILAYER GRATING

COMPACT SPECTROMETER   FOR SOFT X-RAY REGIONCOMPACT SPECTROMETER   FOR SOFT X-RAY REGION

Specification

  available possible improvement
spectral range 12.4 — 25.0 nm 3.0 — 25.0 nm
grating period 0.1 µm 0.04 µm
number of periods 500 4000
entrance aperture angle 2 mrad 10 mrad
diffraction efficiency ~ 40% (calculated)  
width of the spectral band at fixed incidence angle 5 nm 
detector X-ray film CCD
dispersion on the focal curve 1 nm/mm  
focal distance 30 mm  
weight 150 g  
sizes 30x30x50 mm