Pulsed laser deposition system with high-speed filtering module

Pulsed laser deposition system with  a velocity-selection module

Is used for quasi-epitaxial   deposition of HTS films and heterostructures on their basis.

The main feathures:

  • Deposition in the classics geometry along axis.
  • Filtering out microdroplets and solid particles in the laser plasma using the velocity filtration.
  • Enables targets replacing in situ and layer-by layer deposition of various materials.
  • Maximal sample size – 15x15mm