Nanotechnology
- Installing for the pulsed laser deposition of HTSC heterostructures with high-speed filtering module
- Laurell Technologies WS-400A
- Mask aligner
- Plasma asher
- Focused ion beam FEI NanoLab 660
- Installation for the manufacture of contact masks for metal deposition by electric spark cutting
- Ultrasonic bonder Kulicke&Soffa 4523
- X-ray diffractometer Rigaku Miniflex 600
- Multifunctional vacuum deposition system