Focused ion beam FEI NanoLab 660

Focused ion beam FEI NanoLab 660

Two columns (Ion  and electron)

Common vacuum space, dry pumping (TMP and ion-getter pumps)

Electron column pumping – two ion-getter pumps

Ion column pumping – one ion-getter pumps

Vacuum             6x10^-4Pa

Electron column source – Schottky cathode

Accelerating voltage V= 200-30000V

Resolution (high voltage regime)  - 1.2nm at V=30kV in secondary electrons

Resolution (high vacuum) 2.5nm  at V= 30kV in backscattered electrons

Ion source  -      Ga, liquid metal

Accelerating voltage   500- 30000V

Local deposition   Pt, W, Cr, SiO2, C