Multifunctional vacuum deposition system

Multifunctional vacuum deposition system

Vacuum system (Torr vacuum, USA) is designated for depositing metal, oxide and other films onto various substrates by thermal evaporation, electron beam evaporation and magnetron sputtering techniques.

• Enables heating and rotation of substrates during  the evaporation process.
• Enables permanent control of the film deposition thickness by a quartz monitor.
• The evaporation chamber is equipped with an ion gun for substrates etching and cleaning prior deposition.
• Magnetron sputtering is possible using three sources, two of which have individual HF power supply.
• E-beam evaporator is equipped with a carousel with 4 crucibles.
• Thermal evaporation from a tungsten boat.

All sources have shutters, to eliminate potential cross deposition.

Multifunctional vacuum deposition system «TORR».

Vacuum chamber