Pulsed laser deposition PLD/MBE system PVD-2300
Light source –excimer laser KrF (245nm)
Pulse rate 100Hz
Pumping system – dry (TMP and spiral pump)
Residual pressure – 5·10-7Tor
Substrate heating to 850оС
Number of targets – 6 (2’’)
P.N. Lebedev Physical Institute of the Russian Academy of Sciences
Light source –excimer laser KrF (245nm)
Pulse rate 100Hz
Pumping system – dry (TMP and spiral pump)
Residual pressure – 5·10-7Tor
Substrate heating to 850оС
Number of targets – 6 (2’’)