Scanning electron microscope JSM-7001F (JEOL)
Scanning electron microscope JSM-7001F (JEOL)
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| Accelerating voltage | 3 to 30 kV (100V steps) |
| Electron Microscope Type | SEM |
| Additional Specifications | Resolution(secondary electron image): 1.2 nm (at 30 kV) 3.0 nm (at 1.0 kV) 3.0 nm (at 15 kV 10mm WD, 5nA) Accelerating Voltage: 0.5 to 2.9 kV (10V steps) Magnification: x10 to 1,000,000x (printed as a 120mm x 90mm micrograph) Imaging Modes: SEI (secondary electron image) BEI to E/T Detector BEI - Option (backscattered electron image TOPO and COMPO) Specimen Stage: Mechanically eucentric at all WDs (all 5 axes automated) Type I X=70mm, Y=50mm, Z=38mm (WD 3 to 41mm) T=-5 to 70° R=360° (4" diameter coverage) Type II X=110mm, Y=80mm, Z=38mm (WD 3 to 41mm) T=-5 to 60° R=360° (6" diameter coverage) Type III X=140mm, Y=80mm Specimen Exchange Airlock: 6" x 10mm 4" x 40mm Operation & Display System: For observation: 20", high resolution FPD Easy to use Windows® XP based automation system Image Resolution: 800 x 600 pixels, 1280 x 1024 pixels, 2560 x 1920 pixels, 5129 x 3840 pixels (16 bit TIFF) On Screen Measurement: Horizontal, vertical, diagonal, point to point, angles Image Processing: Gamma, Brightness & contrast, Kernal Filters, Image Annotation, False Color, Thumbnails Image Selector: SEI, COMPO, TOPO, EDS, ADD, Auxiliary Input Image Database: Image archiving, searching, % area fraction, custom report generation, montaging, image filtering, annotation, brightness & contrast adjustment Auto Functions: AFD (Auto Focus) ACB (Auto Contrast and Brightness Control) ASD (Auto Stigmator) AFD ACB |
Some results from the microscope
Electron image of samples surface
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| log-periodic antenna (with bolometer at the centre) of the one foton detector in the THz range | diamond monocrystal | Top and side view of silicon wafer | superconducting bridge with periodic structure, obtained by etching | |
Results of Energy-dispersive X-ray spectroscopy (EDS)
Characteristic X-ray spectrum
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Element mapping
| Local element analysis
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