Pulsed laser deposition system with high-speed filtering module
Pulsed laser deposition system with a velocity-selection module
Is used for quasi-epitaxial deposition of HTS films and heterostructures on their basis.
The main feathures:
- Deposition in the classics geometry along axis.
- Filtering out microdroplets and solid particles in the laser plasma using the velocity filtration.
- Enables targets replacing in situ and layer-by layer deposition of various materials.
- Maximal sample size – 15x15mm